device_id,point_id,name,unit,dataType,sampleRate,qualityCode,opcNode,protocol
CLF-01,CLF-01.TEMP,炉温,℃,float,1000,true,ns=2;s=CLF.Temp,simulator
CLF-01,CLF-01.PRES,炉压,kPa,float,1000,true,ns=2;s=CLF.Pres,simulator
CLF-01,CLF-01.CL2,氯气流量,m³/h,float,1000,true,ns=2;s=CLF.Cl2,simulator
CLF-01,CLF-01.CO,CO含量,%,float,1000,true,ns=2;s=CLF.CO,simulator
CLF-01,CLF-01.CO2,CO₂含量,%,float,1000,true,ns=2;s=CLF.CO2,simulator
CLF-01,CLF-01.BED,炉层状态,%,float,1000,true,ns=2;s=CLF.Bed,simulator
CLF-01,CLF-01.FEED,进料量,t/h,float,1000,true,ns=2;s=CLF.Feed,simulator
RF-01,RF-01.REDT,还原温度,℃,float,1000,true,ns=2;s=RF.RedT,simulator
RF-01,RF-01.VAC,还原真空度,kPa,float,1000,true,ns=2;s=RF.Vac,simulator
RF-01,RF-01.PURITY,TiCl₄纯度,%,float,60000,true,ns=2;s=RF.Purity,simulator
RF-01,RF-01.IMP,杂质含量,%,float,60000,true,ns=2;s=RF.Imp,simulator
E-01,E-01.PWR,车间电功率,kW,float,1000,true,holding:40010,simulator
E-01,E-01.KWH,车间累计电耗,kWh,float,1000,true,holding:40012,simulator
ST-01,ST-01.STEAM,蒸汽流量,t/h,float,1000,true,ns=2;s=ST.Steam,simulator
CW-01,CW-01.FLOW,循环水流量,m³/h,float,1000,true,ns=2;s=CW.Flow,simulator
CW-01,CW-01.TEMP,循环水温度,℃,float,1000,true,ns=2;s=CW.Temp,simulator