1.2 KiB
1.2 KiB
| 1 | device_id | point_id | name | unit | dataType | sampleRate | qualityCode | opcNode | protocol |
|---|---|---|---|---|---|---|---|---|---|
| 2 | CLF-01 | CLF-01.TEMP | 炉温 | ℃ | float | 1000 | true | ns=2;s=CLF.Temp | simulator |
| 3 | CLF-01 | CLF-01.PRES | 炉压 | kPa | float | 1000 | true | ns=2;s=CLF.Pres | simulator |
| 4 | CLF-01 | CLF-01.CL2 | 氯气流量 | m³/h | float | 1000 | true | ns=2;s=CLF.Cl2 | simulator |
| 5 | CLF-01 | CLF-01.CO | CO含量 | % | float | 1000 | true | ns=2;s=CLF.CO | simulator |
| 6 | CLF-01 | CLF-01.CO2 | CO₂含量 | % | float | 1000 | true | ns=2;s=CLF.CO2 | simulator |
| 7 | CLF-01 | CLF-01.BED | 炉层状态 | % | float | 1000 | true | ns=2;s=CLF.Bed | simulator |
| 8 | CLF-01 | CLF-01.FEED | 进料量 | t/h | float | 1000 | true | ns=2;s=CLF.Feed | simulator |
| 9 | RF-01 | RF-01.REDT | 还原温度 | ℃ | float | 1000 | true | ns=2;s=RF.RedT | simulator |
| 10 | RF-01 | RF-01.VAC | 还原真空度 | kPa | float | 1000 | true | ns=2;s=RF.Vac | simulator |
| 11 | RF-01 | RF-01.PURITY | TiCl₄纯度 | % | float | 60000 | true | ns=2;s=RF.Purity | simulator |
| 12 | RF-01 | RF-01.IMP | 杂质含量 | % | float | 60000 | true | ns=2;s=RF.Imp | simulator |
| 13 | E-01 | E-01.PWR | 车间电功率 | kW | float | 1000 | true | holding:40010 | simulator |
| 14 | E-01 | E-01.KWH | 车间累计电耗 | kWh | float | 1000 | true | holding:40012 | simulator |
| 15 | ST-01 | ST-01.STEAM | 蒸汽流量 | t/h | float | 1000 | true | ns=2;s=ST.Steam | simulator |
| 16 | CW-01 | CW-01.FLOW | 循环水流量 | m³/h | float | 1000 | true | ns=2;s=CW.Flow | simulator |
| 17 | CW-01 | CW-01.TEMP | 循环水温度 | ℃ | float | 1000 | true | ns=2;s=CW.Temp | simulator |